minimum detectable quantity

SO₂、H₂S、HF

≤0.1μL/L

CO

≤0.5μL/L

SF₆

≤0.01%

N₂

≤0.01%

CF₄

≤0.01%

O₂

≤0.001%

dew point

≤0.1℃

precision

SO₂、H₂S、HF

measured value ≤ 10 μL/L,  error≤ ± 0.5 μL/L

measured value > 10 μL/L,  error≤ ± 5%.

CO

measured value≤ 50 μL/L, error ≤ ± 2.0 μL/L

measured value > 50 μL/L,error ≤ ± 4%

SF₆

Pure gas ≤ ± 0.1% (W/W)

mixed gas ≤ ± 0.5%

N₂

≤±0.5%

CF₄

≤±0.5%

O₂

≤±0.05%

Dew point: resistance capacitance

≤±1℃

zero drift

When the temperature changes from -20 ° C to 50 ° C, the maximum drift: SO₂ + SOF₂, H₂S, HF ≤ ± 0.1 μL/L, CO ≤ ± 0.5 μL/L