minimum detectable quantity

SO₂+SOF₂、H₂S、HF

≤0.1μL/L

large-scale SO₂

≤1μL/L

CO,CF₄,H₂

≤0.5μL/L

purity

≤0.03%

pressure

≤0.001Mpa

dew point

0.1 ℃ 0.1μL / L

temperature

0.1℃

precision

SO₂+SOF₂、H₂S、HF

measured value  ≤ 10 μL/L,  error≤ ± 0.5 μL/L

measured value > 10 μL/L, error≤ ± 5%.

large-scale SO₂

detection value> 100 μL/L,  error ≤± 5%.

CO,CF4,H2

measured value ≤ 50 μL/L, error ≤ ± 2.0 μL/L

measured value > 50 μL/L, error  ≤ ± 4%

purity

From 90% to 100%,  error≤0.20% (m/m).

pressure

0.001

dew point

When the dew point is -60~ 0 ° C, the error is ≤ ± 1.0 ° C

temperature

±0.1℃